Development of arc suppression technique for reactive magnetron sputtering

Development of arc suppression technique for reactive magnetron sputtering

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Bibliographic Details
Date:2005
Main Authors: S. V. Dudin, V. I. Farenik, A. N. Dahov, J. Walkowicz
Format: Article
Language:English
Published: 2005
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000859378
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-106993
record_format dspace
spelling open-sciencenbuvgovua-1069932024-04-17T19:11:04Z Development of arc suppression technique for reactive magnetron sputtering S. V. Dudin V. I. Farenik A. N. Dahov J. Walkowicz 1999-8074 2005 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000859378 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
S. V. Dudin
V. I. Farenik
A. N. Dahov
J. Walkowicz
Development of arc suppression technique for reactive magnetron sputtering
format Article
author S. V. Dudin
V. I. Farenik
A. N. Dahov
J. Walkowicz
author_facet S. V. Dudin
V. I. Farenik
A. N. Dahov
J. Walkowicz
author_sort S. V. Dudin
title Development of arc suppression technique for reactive magnetron sputtering
title_short Development of arc suppression technique for reactive magnetron sputtering
title_full Development of arc suppression technique for reactive magnetron sputtering
title_fullStr Development of arc suppression technique for reactive magnetron sputtering
title_full_unstemmed Development of arc suppression technique for reactive magnetron sputtering
title_sort development of arc suppression technique for reactive magnetron sputtering
publishDate 2005
url http://jnas.nbuv.gov.ua/article/UJRN-0000859378
work_keys_str_mv AT svdudin developmentofarcsuppressiontechniqueforreactivemagnetronsputtering
AT vifarenik developmentofarcsuppressiontechniqueforreactivemagnetronsputtering
AT andahov developmentofarcsuppressiontechniqueforreactivemagnetronsputtering
AT jwalkowicz developmentofarcsuppressiontechniqueforreactivemagnetronsputtering
first_indexed 2025-07-22T17:19:30Z
last_indexed 2025-07-22T17:19:30Z
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