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Development of arc suppression technique for reactive magnetron sputtering

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Bibliographic Details
Date:	2005
Main Authors:	S. V. Dudin, V. I. Farenik, A. N. Dahov, J. Walkowicz
Format:	Article
Language:	English
Published:	2005
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000859378
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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