Petukhov, V. V., Goncharov, A. A., Konovalov, V. A., Terpij, D. N., & Stupak, V. A. (2005). Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films.
Chicago-Zitierstil (17. Ausg.)Petukhov, V. V., A. A. Goncharov, V. A. Konovalov, D. N. Terpij, und V. A. Stupak. Influence of Spattering Regimes and Spattering System Geometry on the Thickness and Composition of Prepared Films. 2005.
MLA-Zitierstil (8. Ausg.)Petukhov, V. V., et al. Influence of Spattering Regimes and Spattering System Geometry on the Thickness and Composition of Prepared Films. 2005.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.