APA (7th ed.) Citation

Petukhov, V. V., Goncharov, A. A., Konovalov, V. A., Terpij, D. N., & Stupak, V. A. (2005). Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films.

Chicago Style (17th ed.) Citation

Petukhov, V. V., A. A. Goncharov, V. A. Konovalov, D. N. Terpij, and V. A. Stupak. Influence of Spattering Regimes and Spattering System Geometry on the Thickness and Composition of Prepared Films. 2005.

MLA (8th ed.) Citation

Petukhov, V. V., et al. Influence of Spattering Regimes and Spattering System Geometry on the Thickness and Composition of Prepared Films. 2005.

Warning: These citations may not always be 100% accurate.