Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films
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| Datum: | 2005 |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2005
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| Schriftenreihe: | Physical surface engineering |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000859385 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606357936701440 |
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| author | V. V. Petukhov A. A. Goncharov V. A. Konovalov D. N. Terpij V. A. Stupak |
| author_facet | V. V. Petukhov A. A. Goncharov V. A. Konovalov D. N. Terpij V. A. Stupak |
| author_sort | V. V. Petukhov |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:19:32Z |
| format | Article |
| id | open-sciencenbuvgovua-107000 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:19:32Z |
| publishDate | 2005 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1070002024-04-17T19:11:09Z Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films V. V. Petukhov A. A. Goncharov V. A. Konovalov D. N. Terpij V. A. Stupak 1999-8074 2005 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000859385 Article |
| spellingShingle | Physical surface engineering V. V. Petukhov A. A. Goncharov V. A. Konovalov D. N. Terpij V. A. Stupak Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title | Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_full | Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_fullStr | Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_full_unstemmed | Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_short | Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_sort | influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000859385 |
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