Studying on a beam of protons film of alloy Si-Ge, received by method CVD

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Bibliographic Details
Date:2007
Main Authors: I. K. Kovalchuk, V. V. Levenets, A. P. Omelnik, A. A. Shchur, B. M. Shirokov
Format: Article
Language:English
Published: 2007
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000867748
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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-1073102024-04-17T19:12:50Z Studying on a beam of protons film of alloy Si-Ge, received by method CVD I. K. Kovalchuk V. V. Levenets A. P. Omelnik A. A. Shchur B. M. Shirokov 1999-8074 2007 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000867748 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
I. K. Kovalchuk
V. V. Levenets
A. P. Omelnik
A. A. Shchur
B. M. Shirokov
Studying on a beam of protons film of alloy Si-Ge, received by method CVD
format Article
author I. K. Kovalchuk
V. V. Levenets
A. P. Omelnik
A. A. Shchur
B. M. Shirokov
author_facet I. K. Kovalchuk
V. V. Levenets
A. P. Omelnik
A. A. Shchur
B. M. Shirokov
author_sort I. K. Kovalchuk
title Studying on a beam of protons film of alloy Si-Ge, received by method CVD
title_short Studying on a beam of protons film of alloy Si-Ge, received by method CVD
title_full Studying on a beam of protons film of alloy Si-Ge, received by method CVD
title_fullStr Studying on a beam of protons film of alloy Si-Ge, received by method CVD
title_full_unstemmed Studying on a beam of protons film of alloy Si-Ge, received by method CVD
title_sort studying on a beam of protons film of alloy si-ge, received by method cvd
publishDate 2007
url http://jnas.nbuv.gov.ua/article/UJRN-0000867748
work_keys_str_mv AT ikkovalchuk studyingonabeamofprotonsfilmofalloysigereceivedbymethodcvd
AT vvlevenets studyingonabeamofprotonsfilmofalloysigereceivedbymethodcvd
AT apomelnik studyingonabeamofprotonsfilmofalloysigereceivedbymethodcvd
AT aashchur studyingonabeamofprotonsfilmofalloysigereceivedbymethodcvd
AT bmshirokov studyingonabeamofprotonsfilmofalloysigereceivedbymethodcvd
first_indexed 2025-07-22T17:24:29Z
last_indexed 2025-07-22T17:24:29Z
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