The effect of nitrogen pressure on the properties of superhard TiN coatings during their deposition

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Datum:2007
Hauptverfasser: A. A. Andreev, V. M. Shulaev, V. F. Gorban, V. A. Stolbovoj
Format: Artikel
Sprache:English
Veröffentlicht: 2007
Schriftenreihe:Physical surface engineering
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0000867749
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-1073112024-04-17T19:12:50Z The effect of nitrogen pressure on the properties of superhard TiN coatings during their deposition A. A. Andreev V. M. Shulaev V. F. Gorban V. A. Stolbovoj 1999-8074 2007 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000867749 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
A. A. Andreev
V. M. Shulaev
V. F. Gorban
V. A. Stolbovoj
The effect of nitrogen pressure on the properties of superhard TiN coatings during their deposition
format Article
author A. A. Andreev
V. M. Shulaev
V. F. Gorban
V. A. Stolbovoj
author_facet A. A. Andreev
V. M. Shulaev
V. F. Gorban
V. A. Stolbovoj
author_sort A. A. Andreev
title The effect of nitrogen pressure on the properties of superhard TiN coatings during their deposition
title_short The effect of nitrogen pressure on the properties of superhard TiN coatings during their deposition
title_full The effect of nitrogen pressure on the properties of superhard TiN coatings during their deposition
title_fullStr The effect of nitrogen pressure on the properties of superhard TiN coatings during their deposition
title_full_unstemmed The effect of nitrogen pressure on the properties of superhard TiN coatings during their deposition
title_sort effect of nitrogen pressure on the properties of superhard tin coatings during their deposition
publishDate 2007
url http://jnas.nbuv.gov.ua/article/UJRN-0000867749
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first_indexed 2025-07-22T17:24:30Z
last_indexed 2025-07-22T17:24:30Z
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