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Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma

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Bibliographic Details
Date:	2008
Main Authors:	V. M. Shulaev, A. A. Andreev, V. A. Stolbovoj, G. A. Pribytkov, A. V. Gurskikh, E. N. Korosteleva, V. V. Korzhova
Format:	Article
Language:	English
Published:	2008
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000867771
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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