APA (7th ed.) Citation

Derevjanko, A. V., Stervoedov, A. N., & Silkin, J. (2008). Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization.

Chicago Style (17th ed.) Citation

Derevjanko, A. V., A. N. Stervoedov, and Ju Silkin. Ion-beam Deposition of Ultrathin Metall Nitride and Oxynitride Films Process Stabilization. 2008.

MLA (8th ed.) Citation

Derevjanko, A. V., et al. Ion-beam Deposition of Ultrathin Metall Nitride and Oxynitride Films Process Stabilization. 2008.

Warning: These citations may not always be 100% accurate.