Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization
Збережено в:
| Дата: | 2008 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2008
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000867772 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606449785667584 |
|---|---|
| author | A. V. Derevjanko A. N. Stervoedov Ju. Silkin |
| author_facet | A. V. Derevjanko A. N. Stervoedov Ju. Silkin |
| author_sort | A. V. Derevjanko |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:25:49Z |
| format | Article |
| id | open-sciencenbuvgovua-107332 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:25:49Z |
| publishDate | 2008 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1073322024-04-17T19:13:02Z Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization A. V. Derevjanko A. N. Stervoedov Ju. Silkin 1999-8074 2008 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000867772 Article |
| spellingShingle | Physical surface engineering A. V. Derevjanko A. N. Stervoedov Ju. Silkin Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| title | Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| title_full | Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| title_fullStr | Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| title_full_unstemmed | Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| title_short | Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| title_sort | ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000867772 |
| work_keys_str_mv | AT avderevjanko ionbeamdepositionofultrathinmetallnitrideandoxynitridefilmsprocessstabilization AT anstervoedov ionbeamdepositionofultrathinmetallnitrideandoxynitridefilmsprocessstabilization AT jusilkin ionbeamdepositionofultrathinmetallnitrideandoxynitridefilmsprocessstabilization |