Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization
Збережено в:
| Дата: | 2008 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2008
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000867772 |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-107332 |
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dspace |
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open-sciencenbuvgovua-1073322024-04-17T19:13:02Z Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization A. V. Derevjanko A. N. Stervoedov Ju. Silkin 1999-8074 2008 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000867772 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering A. V. Derevjanko A. N. Stervoedov Ju. Silkin Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| format |
Article |
| author |
A. V. Derevjanko A. N. Stervoedov Ju. Silkin |
| author_facet |
A. V. Derevjanko A. N. Stervoedov Ju. Silkin |
| author_sort |
A. V. Derevjanko |
| title |
Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| title_short |
Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| title_full |
Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| title_fullStr |
Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| title_full_unstemmed |
Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| title_sort |
ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization |
| publishDate |
2008 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000867772 |
| work_keys_str_mv |
AT avderevjanko ionbeamdepositionofultrathinmetallnitrideandoxynitridefilmsprocessstabilization AT anstervoedov ionbeamdepositionofultrathinmetallnitrideandoxynitridefilmsprocessstabilization AT jusilkin ionbeamdepositionofultrathinmetallnitrideandoxynitridefilmsprocessstabilization |
| first_indexed |
2024-04-18T06:10:09Z |
| last_indexed |
2024-04-18T06:10:09Z |
| _version_ |
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