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Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization

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Bibliographic Details
Date:	2008
Main Authors:	A. V. Derevjanko, A. N. Stervoedov, Ju. Silkin
Format:	Article
Language:	English
Published:	2008
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000867772
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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