The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation
Збережено в:
| Дата: | 2008 |
|---|---|
| Автори: | , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2008
|
| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000872884 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-107811 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-1078112024-04-17T19:15:36Z The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation F. F. Komarov O. V. Milchanin A. M. Mironov A. I. Kupchishin 1999-8074 2008 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000872884 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering F. F. Komarov O. V. Milchanin A. M. Mironov A. I. Kupchishin The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| format |
Article |
| author |
F. F. Komarov O. V. Milchanin A. M. Mironov A. I. Kupchishin |
| author_facet |
F. F. Komarov O. V. Milchanin A. M. Mironov A. I. Kupchishin |
| author_sort |
F. F. Komarov |
| title |
The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| title_short |
The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| title_full |
The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| title_fullStr |
The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| title_full_unstemmed |
The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| title_sort |
formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| publishDate |
2008 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000872884 |
| work_keys_str_mv |
AT ffkomarov theformationofisolatingandgetteringlayersinsemiconductorswithuseofmediumenergyprotonimplantation AT ovmilchanin theformationofisolatingandgetteringlayersinsemiconductorswithuseofmediumenergyprotonimplantation AT ammironov theformationofisolatingandgetteringlayersinsemiconductorswithuseofmediumenergyprotonimplantation AT aikupchishin theformationofisolatingandgetteringlayersinsemiconductorswithuseofmediumenergyprotonimplantation AT ffkomarov formationofisolatingandgetteringlayersinsemiconductorswithuseofmediumenergyprotonimplantation AT ovmilchanin formationofisolatingandgetteringlayersinsemiconductorswithuseofmediumenergyprotonimplantation AT ammironov formationofisolatingandgetteringlayersinsemiconductorswithuseofmediumenergyprotonimplantation AT aikupchishin formationofisolatingandgetteringlayersinsemiconductorswithuseofmediumenergyprotonimplantation |
| first_indexed |
2024-04-18T06:12:07Z |
| last_indexed |
2024-04-18T06:12:07Z |
| _version_ |
1796888531221610496 |