The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation
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| Datum: | 2008 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | English |
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2008
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| Schriftenreihe: | Physical surface engineering |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000872884 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-1078112024-04-17T19:15:36Z The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation F. F. Komarov O. V. Milchanin A. M. Mironov A. I. Kupchishin 1999-8074 2008 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000872884 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering F. F. Komarov O. V. Milchanin A. M. Mironov A. I. Kupchishin The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| format |
Article |
| author |
F. F. Komarov O. V. Milchanin A. M. Mironov A. I. Kupchishin |
| author_facet |
F. F. Komarov O. V. Milchanin A. M. Mironov A. I. Kupchishin |
| author_sort |
F. F. Komarov |
| title |
The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| title_short |
The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| title_full |
The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| title_fullStr |
The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| title_full_unstemmed |
The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| title_sort |
formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation |
| publishDate |
2008 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000872884 |
| work_keys_str_mv |
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| first_indexed |
2025-07-22T17:32:37Z |
| last_indexed |
2025-07-22T17:32:37Z |
| _version_ |
1850422835412992000 |