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The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation

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Bibliographic Details
Date:	2008
Main Authors:	F. F. Komarov, O. V. Milchanin, A. M. Mironov, A. I. Kupchishin
Format:	Article
Language:	English
Published:	2008
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000872884
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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