Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge

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Datum:2008
Hauptverfasser: A. D. Pogrebnjak, V. M. Beresnev, M. V. Iljashenko, S. I. Protsenko, S. N. Dub, P. V. Turbin, G. V. Kirik, A. P. Shipilenko, M. K. Kylyshkanov, V. I. Grishchenko
Format: Artikel
Sprache:Englisch
Veröffentlicht: 2008
Schriftenreihe:Physical surface engineering
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0000872896
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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author A. D. Pogrebnjak
V. M. Beresnev
M. V. Iljashenko
S. I. Protsenko
S. N. Dub
P. V. Turbin
G. V. Kirik
A. P. Shipilenko
M. K. Kylyshkanov
V. I. Grishchenko
author_facet A. D. Pogrebnjak
V. M. Beresnev
M. V. Iljashenko
S. I. Protsenko
S. N. Dub
P. V. Turbin
G. V. Kirik
A. P. Shipilenko
M. K. Kylyshkanov
V. I. Grishchenko
author_sort A. D. Pogrebnjak
collection Open-Science
first_indexed 2025-07-22T17:33:39Z
format Article
id open-sciencenbuvgovua-107823
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
language English
last_indexed 2025-07-22T17:33:39Z
publishDate 2008
record_format dspace
series Physical surface engineering
spelling open-sciencenbuvgovua-1078232024-04-17T19:15:40Z Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge A. D. Pogrebnjak V. M. Beresnev M. V. Iljashenko S. I. Protsenko S. N. Dub P. V. Turbin G. V. Kirik A. P. Shipilenko M. K. Kylyshkanov V. I. Grishchenko 1999-8074 2008 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000872896 Article
spellingShingle Physical surface engineering
A. D. Pogrebnjak
V. M. Beresnev
M. V. Iljashenko
S. I. Protsenko
S. N. Dub
P. V. Turbin
G. V. Kirik
A. P. Shipilenko
M. K. Kylyshkanov
V. I. Grishchenko
Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge
title Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge
title_full Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge
title_fullStr Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge
title_full_unstemmed Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge
title_short Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge
title_sort structure features and properties of hard ti-al-n and superhard ti-si-n nanocomposite coatings deposited using pvd in hf discharge
url http://jnas.nbuv.gov.ua/article/UJRN-0000872896
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