Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge

Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge

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Bibliographic Details
Date:2008
Main Authors: A. D. Pogrebnjak, V. M. Beresnev, M. V. Iljashenko, S. I. Protsenko, S. N. Dub, P. V. Turbin, G. V. Kirik, A. P. Shipilenko, M. K. Kylyshkanov, V. I. Grishchenko
Format: Article
Language:English
Published: 2008
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000872896
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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-107823
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spelling open-sciencenbuvgovua-1078232024-04-17T19:15:40Z Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge A. D. Pogrebnjak V. M. Beresnev M. V. Iljashenko S. I. Protsenko S. N. Dub P. V. Turbin G. V. Kirik A. P. Shipilenko M. K. Kylyshkanov V. I. Grishchenko 1999-8074 2008 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000872896 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
A. D. Pogrebnjak
V. M. Beresnev
M. V. Iljashenko
S. I. Protsenko
S. N. Dub
P. V. Turbin
G. V. Kirik
A. P. Shipilenko
M. K. Kylyshkanov
V. I. Grishchenko
Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge
format Article
author A. D. Pogrebnjak
V. M. Beresnev
M. V. Iljashenko
S. I. Protsenko
S. N. Dub
P. V. Turbin
G. V. Kirik
A. P. Shipilenko
M. K. Kylyshkanov
V. I. Grishchenko
author_facet A. D. Pogrebnjak
V. M. Beresnev
M. V. Iljashenko
S. I. Protsenko
S. N. Dub
P. V. Turbin
G. V. Kirik
A. P. Shipilenko
M. K. Kylyshkanov
V. I. Grishchenko
author_sort A. D. Pogrebnjak
title Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge
title_short Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge
title_full Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge
title_fullStr Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge
title_full_unstemmed Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge
title_sort structure features and properties of hard ti-al-n and superhard ti-si-n nanocomposite coatings deposited using pvd in hf discharge
publishDate 2008
url http://jnas.nbuv.gov.ua/article/UJRN-0000872896
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AT mviljashenko structurefeaturesandpropertiesofhardtialnandsuperhardtisinnanocompositecoatingsdepositedusingpvdinhfdischarge
AT siprotsenko structurefeaturesandpropertiesofhardtialnandsuperhardtisinnanocompositecoatingsdepositedusingpvdinhfdischarge
AT sndub structurefeaturesandpropertiesofhardtialnandsuperhardtisinnanocompositecoatingsdepositedusingpvdinhfdischarge
AT pvturbin structurefeaturesandpropertiesofhardtialnandsuperhardtisinnanocompositecoatingsdepositedusingpvdinhfdischarge
AT gvkirik structurefeaturesandpropertiesofhardtialnandsuperhardtisinnanocompositecoatingsdepositedusingpvdinhfdischarge
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AT vigrishchenko structurefeaturesandpropertiesofhardtialnandsuperhardtisinnanocompositecoatingsdepositedusingpvdinhfdischarge
first_indexed 2025-07-22T17:33:39Z
last_indexed 2025-07-22T17:33:39Z
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