Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge
Збережено в:
| Дата: | 2008 |
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| Автори: | , , , , , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2008
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000872896 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-107823 |
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open-sciencenbuvgovua-1078232024-04-17T19:15:40Z Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge A. D. Pogrebnjak V. M. Beresnev M. V. Iljashenko S. I. Protsenko S. N. Dub P. V. Turbin G. V. Kirik A. P. Shipilenko M. K. Kylyshkanov V. I. Grishchenko 1999-8074 2008 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000872896 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering A. D. Pogrebnjak V. M. Beresnev M. V. Iljashenko S. I. Protsenko S. N. Dub P. V. Turbin G. V. Kirik A. P. Shipilenko M. K. Kylyshkanov V. I. Grishchenko Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge |
| format |
Article |
| author |
A. D. Pogrebnjak V. M. Beresnev M. V. Iljashenko S. I. Protsenko S. N. Dub P. V. Turbin G. V. Kirik A. P. Shipilenko M. K. Kylyshkanov V. I. Grishchenko |
| author_facet |
A. D. Pogrebnjak V. M. Beresnev M. V. Iljashenko S. I. Protsenko S. N. Dub P. V. Turbin G. V. Kirik A. P. Shipilenko M. K. Kylyshkanov V. I. Grishchenko |
| author_sort |
A. D. Pogrebnjak |
| title |
Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge |
| title_short |
Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge |
| title_full |
Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge |
| title_fullStr |
Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge |
| title_full_unstemmed |
Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge |
| title_sort |
structure features and properties of hard ti-al-n and superhard ti-si-n nanocomposite coatings deposited using pvd in hf discharge |
| publishDate |
2008 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000872896 |
| work_keys_str_mv |
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2024-04-18T06:12:09Z |
| last_indexed |
2024-04-18T06:12:09Z |
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