Structure features and properties of hard Ti-Al-N and superhard Ti-Si-N nanocomposite coatings deposited using PVD in HF discharge - A. D. Pogrebnjak; V. M. Beresnev; M. V. Iljashenko; S. I. Protsenko; S. N. Dub; P. V. Turbin; G. V. Kirik; A. P. Shipilenko; M. K. Kylyshkanov; V. I. Grishchenko (Physical surface engineering, 2008)