Synthesis of dielectric compounds based on a DC magnetron
Saved in:
| Date: | 2009 |
|---|---|
| Main Authors: | O. V. Zykov, S. D. Yakovin, S. V. Dudin |
| Format: | Article |
| Language: | English |
| Published: |
2009
|
| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000872970 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNASSimilar Items
-
Synthesis of thin-film Ta₂O₅ coatings by reactive magnetron sputtering
by: Yakovin, S., et al.
Published: (2016) -
Double magnetron cluster set-up for synthesis of micro and nano structure coatings
by: Yakovin, S., et al.
Published: (2015) -
Oxygen activation effect on reactive magnetron synthesis of alumina coatings
by: Walkowicz, J., et al.
Published: (2007) -
Oxygen activation effect on reactive magnetron synthesis of alumina coatings
by: Walkowicz, J., et al.
Published: (2007) -
Optical and mass spectra from reactive plasma at magnetron deposition of tantalum oxynitride
by: Dudin, S., et al.
Published: (2021)