Distribution of chemical composition depth in Cr-O-N films obtained by the method ion-stimulated deposition
Збережено в:
| Дата: | 2009 |
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| Автор: | |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2009
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000872972 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-107855 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-1078552024-04-17T19:15:57Z Distribution of chemical composition depth in Cr-O-N films obtained by the method ion-stimulated deposition A. N. Stervoedov 1999-8074 2009 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000872972 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering A. N. Stervoedov Distribution of chemical composition depth in Cr-O-N films obtained by the method ion-stimulated deposition |
| format |
Article |
| author |
A. N. Stervoedov |
| author_facet |
A. N. Stervoedov |
| author_sort |
A. N. Stervoedov |
| title |
Distribution of chemical composition depth in Cr-O-N films obtained by the method ion-stimulated deposition |
| title_short |
Distribution of chemical composition depth in Cr-O-N films obtained by the method ion-stimulated deposition |
| title_full |
Distribution of chemical composition depth in Cr-O-N films obtained by the method ion-stimulated deposition |
| title_fullStr |
Distribution of chemical composition depth in Cr-O-N films obtained by the method ion-stimulated deposition |
| title_full_unstemmed |
Distribution of chemical composition depth in Cr-O-N films obtained by the method ion-stimulated deposition |
| title_sort |
distribution of chemical composition depth in cr-o-n films obtained by the method ion-stimulated deposition |
| publishDate |
2009 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000872972 |
| work_keys_str_mv |
AT anstervoedov distributionofchemicalcompositiondepthincronfilmsobtainedbythemethodionstimulateddeposition |
| first_indexed |
2025-07-22T17:33:52Z |
| last_indexed |
2025-07-22T17:33:52Z |
| _version_ |
1850422840484954112 |