On the nature of the effect of various gases on the process of condensation of coatings from a vacuum arc plasma
Збережено в:
| Дата: | 2009 |
|---|---|
| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2009
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000872980 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-107863 |
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| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-1078632024-04-17T19:16:01Z On the nature of the effect of various gases on the process of condensation of coatings from a vacuum arc plasma V. M. Khoroshikh S. A. Leonov 1999-8074 2009 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000872980 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering V. M. Khoroshikh S. A. Leonov On the nature of the effect of various gases on the process of condensation of coatings from a vacuum arc plasma |
| format |
Article |
| author |
V. M. Khoroshikh S. A. Leonov |
| author_facet |
V. M. Khoroshikh S. A. Leonov |
| author_sort |
V. M. Khoroshikh |
| title |
On the nature of the effect of various gases on the process of condensation of coatings from a vacuum arc plasma |
| title_short |
On the nature of the effect of various gases on the process of condensation of coatings from a vacuum arc plasma |
| title_full |
On the nature of the effect of various gases on the process of condensation of coatings from a vacuum arc plasma |
| title_fullStr |
On the nature of the effect of various gases on the process of condensation of coatings from a vacuum arc plasma |
| title_full_unstemmed |
On the nature of the effect of various gases on the process of condensation of coatings from a vacuum arc plasma |
| title_sort |
on the nature of the effect of various gases on the process of condensation of coatings from a vacuum arc plasma |
| publishDate |
2009 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000872980 |
| work_keys_str_mv |
AT vmkhoroshikh onthenatureoftheeffectofvariousgasesontheprocessofcondensationofcoatingsfromavacuumarcplasma AT saleonov onthenatureoftheeffectofvariousgasesontheprocessofcondensationofcoatingsfromavacuumarcplasma |
| first_indexed |
2024-04-18T06:12:19Z |
| last_indexed |
2024-04-18T06:12:19Z |
| _version_ |
1796888536659525632 |