On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa
Збережено в:
Дата: | 2009 |
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Автори: | , , , |
Формат: | Стаття |
Мова: | English |
Опубліковано: |
2009
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Назва видання: | Physical surface engineering |
Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000873031 |
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Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-1078692024-04-17T19:16:07Z On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa V. M. Khoroshikh S. A. Leonov V. A. Belous G. N. Tolmacheva 1999-8074 2009 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000873031 Article |
institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
collection |
Open-Science |
language |
English |
series |
Physical surface engineering |
spellingShingle |
Physical surface engineering V. M. Khoroshikh S. A. Leonov V. A. Belous G. N. Tolmacheva On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa |
format |
Article |
author |
V. M. Khoroshikh S. A. Leonov V. A. Belous G. N. Tolmacheva |
author_facet |
V. M. Khoroshikh S. A. Leonov V. A. Belous G. N. Tolmacheva |
author_sort |
V. M. Khoroshikh |
title |
On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa |
title_short |
On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa |
title_full |
On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa |
title_fullStr |
On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa |
title_full_unstemmed |
On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa |
title_sort |
on the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 pa |
publishDate |
2009 |
url |
http://jnas.nbuv.gov.ua/article/UJRN-0000873031 |
work_keys_str_mv |
AT vmkhoroshikh onthefeaturesoftheprocessofdepositionofionplasmacoatingsbasedontitaniumnitrideintherangeofnitrogenpressuresof210pa AT saleonov onthefeaturesoftheprocessofdepositionofionplasmacoatingsbasedontitaniumnitrideintherangeofnitrogenpressuresof210pa AT vabelous onthefeaturesoftheprocessofdepositionofionplasmacoatingsbasedontitaniumnitrideintherangeofnitrogenpressuresof210pa AT gntolmacheva onthefeaturesoftheprocessofdepositionofionplasmacoatingsbasedontitaniumnitrideintherangeofnitrogenpressuresof210pa |
first_indexed |
2024-04-18T06:12:20Z |
last_indexed |
2024-04-18T06:12:20Z |
_version_ |
1796888537287622656 |