On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa
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| Date: | 2009 |
|---|---|
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
2009
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| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000873031 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606692953587712 |
|---|---|
| author | V. M. Khoroshikh S. A. Leonov V. A. Belous G. N. Tolmacheva |
| author_facet | V. M. Khoroshikh S. A. Leonov V. A. Belous G. N. Tolmacheva |
| author_sort | V. M. Khoroshikh |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:33:57Z |
| format | Article |
| id | open-sciencenbuvgovua-107869 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:33:57Z |
| publishDate | 2009 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1078692024-04-17T19:16:07Z On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa V. M. Khoroshikh S. A. Leonov V. A. Belous G. N. Tolmacheva 1999-8074 2009 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000873031 Article |
| spellingShingle | Physical surface engineering V. M. Khoroshikh S. A. Leonov V. A. Belous G. N. Tolmacheva On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa |
| title | On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa |
| title_full | On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa |
| title_fullStr | On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa |
| title_full_unstemmed | On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa |
| title_short | On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa |
| title_sort | on the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 pa |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000873031 |
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