On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa

On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa

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Bibliographic Details
Date:2009
Main Authors: V. M. Khoroshikh, S. A. Leonov, V. A. Belous, G. N. Tolmacheva
Format: Article
Language:English
Published: 2009
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000873031
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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-1078692024-04-17T19:16:07Z On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa V. M. Khoroshikh S. A. Leonov V. A. Belous G. N. Tolmacheva 1999-8074 2009 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000873031 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
V. M. Khoroshikh
S. A. Leonov
V. A. Belous
G. N. Tolmacheva
On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa
format Article
author V. M. Khoroshikh
S. A. Leonov
V. A. Belous
G. N. Tolmacheva
author_facet V. M. Khoroshikh
S. A. Leonov
V. A. Belous
G. N. Tolmacheva
author_sort V. M. Khoroshikh
title On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa
title_short On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa
title_full On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa
title_fullStr On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa
title_full_unstemmed On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa
title_sort on the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 pa
publishDate 2009
url http://jnas.nbuv.gov.ua/article/UJRN-0000873031
work_keys_str_mv AT vmkhoroshikh onthefeaturesoftheprocessofdepositionofionplasmacoatingsbasedontitaniumnitrideintherangeofnitrogenpressuresof210pa
AT saleonov onthefeaturesoftheprocessofdepositionofionplasmacoatingsbasedontitaniumnitrideintherangeofnitrogenpressuresof210pa
AT vabelous onthefeaturesoftheprocessofdepositionofionplasmacoatingsbasedontitaniumnitrideintherangeofnitrogenpressuresof210pa
AT gntolmacheva onthefeaturesoftheprocessofdepositionofionplasmacoatingsbasedontitaniumnitrideintherangeofnitrogenpressuresof210pa
first_indexed 2025-07-22T17:33:57Z
last_indexed 2025-07-22T17:33:57Z
_version_ 1850422842003292160

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