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A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films

A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films

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Bibliographic Details
Main Authors: A. Semenov, D. Lubov
Format: Article
Language:English
Published: 2021
Series:Technology and design in electronic equipment
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001434748
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id open-sciencenbuvgovua-109995
record_format dspace
spelling open-sciencenbuvgovua-1099952024-09-16T15:14:44Z A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films A. Semenov D. Lubov 2225-5818 2021 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0001434748 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Technology and design in electronic equipment
spellingShingle Technology and design in electronic equipment
A. Semenov
D. Lubov
A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
format Article
author A. Semenov
D. Lubov
author_facet A. Semenov
D. Lubov
author_sort A. Semenov
title A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
title_short A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
title_full A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
title_fullStr A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
title_full_unstemmed A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
title_sort new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
publishDate 2021
url http://jnas.nbuv.gov.ua/article/UJRN-0001434748
work_keys_str_mv AT asemenov anewapproachtoincreasingthesensitivityofagassensorbasedonnanocrystallinesiliconcarbidefilms
AT dlubov anewapproachtoincreasingthesensitivityofagassensorbasedonnanocrystallinesiliconcarbidefilms
AT asemenov newapproachtoincreasingthesensitivityofagassensorbasedonnanocrystallinesiliconcarbidefilms
AT dlubov newapproachtoincreasingthesensitivityofagassensorbasedonnanocrystallinesiliconcarbidefilms
first_indexed 2024-09-17T04:07:24Z
last_indexed 2024-09-17T04:07:24Z
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