Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition
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| Datum: | 2023 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2023
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| Schriftenreihe: | Ukrainian journal of physics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0001414168 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859609094655049728 |
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| author | M. T. Normuradov Sh. T. Khozhiev K. T. Dovranov X. T. Davranov M. A. Davlatov F. K. Khollokov |
| author_facet | M. T. Normuradov Sh. T. Khozhiev K. T. Dovranov X. T. Davranov M. A. Davlatov F. K. Khollokov |
| author_sort | M. T. Normuradov |
| collection | Open-Science |
| first_indexed | 2025-07-22T18:40:30Z |
| format | Article |
| id | open-sciencenbuvgovua-111659 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T18:40:30Z |
| publishDate | 2023 |
| record_format | dspace |
| series | Ukrainian journal of physics |
| spelling | open-sciencenbuvgovua-1116592024-09-16T15:30:42Z Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition M. T. Normuradov Sh. T. Khozhiev K. T. Dovranov X. T. Davranov M. A. Davlatov F. K. Khollokov 2071-0186 2023 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0001414168 Article |
| spellingShingle | Ukrainian journal of physics M. T. Normuradov Sh. T. Khozhiev K. T. Dovranov X. T. Davranov M. A. Davlatov F. K. Khollokov Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| title | Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| title_full | Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| title_fullStr | Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| title_full_unstemmed | Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| title_short | Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| title_sort | development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001414168 |
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