Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition
Збережено в:
| Дата: | 2023 |
|---|---|
| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2023
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| Назва видання: | Ukrainian journal of physics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001414168 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-111659 |
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| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-1116592024-09-16T15:30:42Z Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition M. T. Normuradov Sh. T. Khozhiev K. T. Dovranov X. T. Davranov M. A. Davlatov F. K. Khollokov 2071-0186 2023 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0001414168 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian journal of physics |
| spellingShingle |
Ukrainian journal of physics M. T. Normuradov Sh. T. Khozhiev K. T. Dovranov X. T. Davranov M. A. Davlatov F. K. Khollokov Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| format |
Article |
| author |
M. T. Normuradov Sh. T. Khozhiev K. T. Dovranov X. T. Davranov M. A. Davlatov F. K. Khollokov |
| author_facet |
M. T. Normuradov Sh. T. Khozhiev K. T. Dovranov X. T. Davranov M. A. Davlatov F. K. Khollokov |
| author_sort |
M. T. Normuradov |
| title |
Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| title_short |
Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| title_full |
Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| title_fullStr |
Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| title_full_unstemmed |
Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| title_sort |
development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition |
| publishDate |
2023 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001414168 |
| work_keys_str_mv |
AT mtnormuradov developmentoftechnologyforobtainingnanosizedheterostructuredfilmsbyionplasmadeposition AT shtkhozhiev developmentoftechnologyforobtainingnanosizedheterostructuredfilmsbyionplasmadeposition AT ktdovranov developmentoftechnologyforobtainingnanosizedheterostructuredfilmsbyionplasmadeposition AT xtdavranov developmentoftechnologyforobtainingnanosizedheterostructuredfilmsbyionplasmadeposition AT madavlatov developmentoftechnologyforobtainingnanosizedheterostructuredfilmsbyionplasmadeposition AT fkkhollokov developmentoftechnologyforobtainingnanosizedheterostructuredfilmsbyionplasmadeposition |
| first_indexed |
2025-07-22T18:40:30Z |
| last_indexed |
2025-07-22T18:40:30Z |
| _version_ |
1850423270757629952 |