Development of a technology for the production of nano-sized heterostructured films by ion-plasma deposition
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| Datum: | 2023 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2023
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| Schriftenreihe: | Ukrainian Journal of Physics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0001416154 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859609111958650880 |
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| author | M. T. Normuradov Sh. T. Khozhiev K. T. Dovranov X. T. Davranov M. A. Davlatov F. K. Khollokov |
| author_facet | M. T. Normuradov Sh. T. Khozhiev K. T. Dovranov X. T. Davranov M. A. Davlatov F. K. Khollokov |
| author_sort | M. T. Normuradov |
| collection | Open-Science |
| first_indexed | 2025-07-22T18:41:49Z |
| format | Article |
| id | open-sciencenbuvgovua-111721 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T18:41:49Z |
| publishDate | 2023 |
| record_format | dspace |
| series | Ukrainian Journal of Physics |
| spelling | open-sciencenbuvgovua-1117212024-09-16T15:31:21Z Development of a technology for the production of nano-sized heterostructured films by ion-plasma deposition M. T. Normuradov Sh. T. Khozhiev K. T. Dovranov X. T. Davranov M. A. Davlatov F. K. Khollokov 0372-400X 2023 en Ukrainian Journal of Physics http://jnas.nbuv.gov.ua/article/UJRN-0001416154 Article |
| spellingShingle | Ukrainian Journal of Physics M. T. Normuradov Sh. T. Khozhiev K. T. Dovranov X. T. Davranov M. A. Davlatov F. K. Khollokov Development of a technology for the production of nano-sized heterostructured films by ion-plasma deposition |
| title | Development of a technology for the production of nano-sized heterostructured films by ion-plasma deposition |
| title_full | Development of a technology for the production of nano-sized heterostructured films by ion-plasma deposition |
| title_fullStr | Development of a technology for the production of nano-sized heterostructured films by ion-plasma deposition |
| title_full_unstemmed | Development of a technology for the production of nano-sized heterostructured films by ion-plasma deposition |
| title_short | Development of a technology for the production of nano-sized heterostructured films by ion-plasma deposition |
| title_sort | development of a technology for the production of nano-sized heterostructured films by ion-plasma deposition |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001416154 |
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