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Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2020
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| Series: | Ukrainian journal of physics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001127992 |
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open-sciencenbuvgovua-11278 |
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open-sciencenbuvgovua-112782024-02-25T17:54:53Z Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky 2071-0186 2020 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0001127992 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian journal of physics |
| spellingShingle |
Ukrainian journal of physics B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| format |
Article |
| author |
B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky |
| author_facet |
B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky |
| author_sort |
B. V. Bilanych |
| title |
Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_short |
Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_full |
Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_fullStr |
Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_full_unstemmed |
Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_sort |
interaction of chalcogenide as4se96 films with electron beam when used as electronic resists |
| publishDate |
2020 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001127992 |
| work_keys_str_mv |
AT bvbilanych interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists AT oshylenko interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists AT vmlatyshev interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists AT afeher interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists AT vsbilanych interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists AT vmrizak interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists AT vkomanicky interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists |
| first_indexed |
2024-03-30T07:02:29Z |
| last_indexed |
2024-03-30T07:02:29Z |
| _version_ |
1796878444551733248 |