Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
Збережено в:
| Дата: | 2020 |
|---|---|
| Автори: | , , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2020
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| Назва видання: | Ukrainian journal of physics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001127992 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859495212979585024 |
|---|---|
| author | B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky |
| author_facet | B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky |
| author_sort | B. V. Bilanych |
| collection | Open-Science |
| first_indexed | 2025-07-17T12:07:20Z |
| format | Article |
| id | open-sciencenbuvgovua-11278 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T12:07:20Z |
| publishDate | 2020 |
| record_format | dspace |
| series | Ukrainian journal of physics |
| spelling | open-sciencenbuvgovua-112782024-02-25T17:54:53Z Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky 2071-0186 2020 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0001127992 Article |
| spellingShingle | Ukrainian journal of physics B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title | Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_full | Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_fullStr | Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_full_unstemmed | Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_short | Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_sort | interaction of chalcogenide as4se96 films with electron beam when used as electronic resists |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001127992 |
| work_keys_str_mv | AT bvbilanych interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists AT oshylenko interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists AT vmlatyshev interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists AT afeher interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists AT vsbilanych interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists AT vmrizak interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists AT vkomanicky interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists |