Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
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| Date: | 2020 |
|---|---|
| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2020
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| Series: | Ukrainian journal of physics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001127992 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859495212979585024 |
|---|---|
| author | B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky |
| author_facet | B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky |
| author_sort | B. V. Bilanych |
| collection | Open-Science |
| first_indexed | 2025-07-17T12:07:20Z |
| format | Article |
| id | open-sciencenbuvgovua-11278 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T12:07:20Z |
| publishDate | 2020 |
| record_format | dspace |
| series | Ukrainian journal of physics |
| spelling | open-sciencenbuvgovua-112782024-02-25T17:54:53Z Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky 2071-0186 2020 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0001127992 Article |
| spellingShingle | Ukrainian journal of physics B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title | Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_full | Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_fullStr | Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_full_unstemmed | Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_short | Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_sort | interaction of chalcogenide as4se96 films with electron beam when used as electronic resists |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001127992 |
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