Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists

Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists

Збережено в:
Бібліографічні деталі
Дата:2020
Автори: B. V. Bilanych, O. Shylenko, V. M. Latyshev, A. Feher, V. S. Bilanych, V. M. Rizak, V. Komanicky
Формат: Стаття
Мова:English
Опубліковано: 2020
Назва видання:Ukrainian journal of physics
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0001127992
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-112782024-02-25T17:54:53Z Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky 2071-0186 2020 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0001127992 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Ukrainian journal of physics
spellingShingle Ukrainian journal of physics
B. V. Bilanych
O. Shylenko
V. M. Latyshev
A. Feher
V. S. Bilanych
V. M. Rizak
V. Komanicky
Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
format Article
author B. V. Bilanych
O. Shylenko
V. M. Latyshev
A. Feher
V. S. Bilanych
V. M. Rizak
V. Komanicky
author_facet B. V. Bilanych
O. Shylenko
V. M. Latyshev
A. Feher
V. S. Bilanych
V. M. Rizak
V. Komanicky
author_sort B. V. Bilanych
title Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
title_short Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
title_full Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
title_fullStr Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
title_full_unstemmed Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
title_sort interaction of chalcogenide as4se96 films with electron beam when used as electronic resists
publishDate 2020
url http://jnas.nbuv.gov.ua/article/UJRN-0001127992
work_keys_str_mv AT bvbilanych interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
AT oshylenko interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
AT vmlatyshev interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
AT afeher interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
AT vsbilanych interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
AT vmrizak interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
AT vkomanicky interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
first_indexed 2024-03-30T07:02:29Z
last_indexed 2024-03-30T07:02:29Z
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