Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
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| Datum: | 2020 |
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| Hauptverfasser: | , , , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2020
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| Schriftenreihe: | Ukrainian journal of physics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0001127992 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-112782024-02-25T17:54:53Z Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky 2071-0186 2020 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0001127992 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian journal of physics |
| spellingShingle |
Ukrainian journal of physics B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| format |
Article |
| author |
B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky |
| author_facet |
B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky |
| author_sort |
B. V. Bilanych |
| title |
Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_short |
Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_full |
Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_fullStr |
Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_full_unstemmed |
Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists |
| title_sort |
interaction of chalcogenide as4se96 films with electron beam when used as electronic resists |
| publishDate |
2020 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001127992 |
| work_keys_str_mv |
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| first_indexed |
2025-07-17T12:07:20Z |
| last_indexed |
2025-07-17T12:07:20Z |
| _version_ |
1850412007916830720 |