Investigation of SiC films obtained on a porous-Si/Si substrate
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| Дата: | 2024 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2024
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| Назва видання: | Chemistry, physics and technology of surface |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001504130 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-113058 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-1130582024-12-23T18:45:23Z Investigation of SiC films obtained on a porous-Si/Si substrate V. V. Kidalov A. F. Dyadenchuk A. G. Zhuk O. Y. Gudimenko S. V. Simchenko 2079-1704 2024 en Chemistry, physics and technology of surface http://jnas.nbuv.gov.ua/article/UJRN-0001504130 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Chemistry, physics and technology of surface |
| spellingShingle |
Chemistry, physics and technology of surface V. V. Kidalov A. F. Dyadenchuk A. G. Zhuk O. Y. Gudimenko S. V. Simchenko Investigation of SiC films obtained on a porous-Si/Si substrate |
| format |
Article |
| author |
V. V. Kidalov A. F. Dyadenchuk A. G. Zhuk O. Y. Gudimenko S. V. Simchenko |
| author_facet |
V. V. Kidalov A. F. Dyadenchuk A. G. Zhuk O. Y. Gudimenko S. V. Simchenko |
| author_sort |
V. V. Kidalov |
| title |
Investigation of SiC films obtained on a porous-Si/Si substrate |
| title_short |
Investigation of SiC films obtained on a porous-Si/Si substrate |
| title_full |
Investigation of SiC films obtained on a porous-Si/Si substrate |
| title_fullStr |
Investigation of SiC films obtained on a porous-Si/Si substrate |
| title_full_unstemmed |
Investigation of SiC films obtained on a porous-Si/Si substrate |
| title_sort |
investigation of sic films obtained on a porous-si/si substrate |
| publishDate |
2024 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001504130 |
| work_keys_str_mv |
AT vvkidalov investigationofsicfilmsobtainedonaporoussisisubstrate AT afdyadenchuk investigationofsicfilmsobtainedonaporoussisisubstrate AT agzhuk investigationofsicfilmsobtainedonaporoussisisubstrate AT oygudimenko investigationofsicfilmsobtainedonaporoussisisubstrate AT svsimchenko investigationofsicfilmsobtainedonaporoussisisubstrate |
| first_indexed |
2024-12-24T04:08:15Z |
| last_indexed |
2024-12-24T04:08:15Z |
| _version_ |
1819293301418754048 |