Investigation of SiC films obtained on a porous-Si/Si substrate
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| Date: | 2024 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2024
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| Series: | Chemistry, physics and technology of surface |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001504130 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859609911538745344 |
|---|---|
| author | V. V. Kidalov A. F. Dyadenchuk A. G. Zhuk O. Y. Gudimenko S. V. Simchenko |
| author_facet | V. V. Kidalov A. F. Dyadenchuk A. G. Zhuk O. Y. Gudimenko S. V. Simchenko |
| author_sort | V. V. Kidalov |
| collection | Open-Science |
| first_indexed | 2025-07-22T19:04:15Z |
| format | Article |
| id | open-sciencenbuvgovua-113058 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T19:04:15Z |
| publishDate | 2024 |
| record_format | dspace |
| series | Chemistry, physics and technology of surface |
| spelling | open-sciencenbuvgovua-1130582024-12-23T18:45:23Z Investigation of SiC films obtained on a porous-Si/Si substrate V. V. Kidalov A. F. Dyadenchuk A. G. Zhuk O. Y. Gudimenko S. V. Simchenko 2079-1704 2024 en Chemistry, physics and technology of surface http://jnas.nbuv.gov.ua/article/UJRN-0001504130 Article |
| spellingShingle | Chemistry, physics and technology of surface V. V. Kidalov A. F. Dyadenchuk A. G. Zhuk O. Y. Gudimenko S. V. Simchenko Investigation of SiC films obtained on a porous-Si/Si substrate |
| title | Investigation of SiC films obtained on a porous-Si/Si substrate |
| title_full | Investigation of SiC films obtained on a porous-Si/Si substrate |
| title_fullStr | Investigation of SiC films obtained on a porous-Si/Si substrate |
| title_full_unstemmed | Investigation of SiC films obtained on a porous-Si/Si substrate |
| title_short | Investigation of SiC films obtained on a porous-Si/Si substrate |
| title_sort | investigation of sic films obtained on a porous-si/si substrate |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001504130 |
| work_keys_str_mv | AT vvkidalov investigationofsicfilmsobtainedonaporoussisisubstrate AT afdyadenchuk investigationofsicfilmsobtainedonaporoussisisubstrate AT agzhuk investigationofsicfilmsobtainedonaporoussisisubstrate AT oygudimenko investigationofsicfilmsobtainedonaporoussisisubstrate AT svsimchenko investigationofsicfilmsobtainedonaporoussisisubstrate |