Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond
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| Дата: | 2020 |
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| Автори: | , , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2020
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| Назва видання: | Superhard Materials |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001130384 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-11476 |
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open-sciencenbuvgovua-114762024-02-25T17:55:22Z Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond B. Deng Ts. Vej M. Ji I. Luo L. Li K. Chzhou L. Ma 0203-3119 2020 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001130384 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials B. Deng Ts. Vej M. Ji I. Luo L. Li K. Chzhou L. Ma Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| format |
Article |
| author |
B. Deng Ts. Vej M. Ji I. Luo L. Li K. Chzhou L. Ma |
| author_facet |
B. Deng Ts. Vej M. Ji I. Luo L. Li K. Chzhou L. Ma |
| author_sort |
B. Deng |
| title |
Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| title_short |
Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| title_full |
Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| title_fullStr |
Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| title_full_unstemmed |
Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| title_sort |
coupling effects of ch4/h2/ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| publishDate |
2020 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001130384 |
| work_keys_str_mv |
AT bdeng couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond AT tsvej couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond AT mji couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond AT iluo couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond AT lli couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond AT kchzhou couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond AT lma couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond |
| first_indexed |
2024-03-30T07:03:25Z |
| last_indexed |
2024-03-30T07:03:25Z |
| _version_ |
1796878465217069056 |