Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond

Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond

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Bibliographic Details
Date:2020
Main Authors: B. Deng, Ts. Vej, M. Ji, I. Luo, L. Li, K. Chzhou, L. Ma
Format: Article
Language:English
Published: 2020
Series:Superhard Materials
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001130384
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-11476
record_format dspace
spelling open-sciencenbuvgovua-114762024-02-25T17:55:22Z Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond B. Deng Ts. Vej M. Ji I. Luo L. Li K. Chzhou L. Ma 0203-3119 2020 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001130384 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Superhard Materials
spellingShingle Superhard Materials
B. Deng
Ts. Vej
M. Ji
I. Luo
L. Li
K. Chzhou
L. Ma
Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond
format Article
author B. Deng
Ts. Vej
M. Ji
I. Luo
L. Li
K. Chzhou
L. Ma
author_facet B. Deng
Ts. Vej
M. Ji
I. Luo
L. Li
K. Chzhou
L. Ma
author_sort B. Deng
title Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond
title_short Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond
title_full Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond
title_fullStr Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond
title_full_unstemmed Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond
title_sort coupling effects of ch4/h2/ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond
publishDate 2020
url http://jnas.nbuv.gov.ua/article/UJRN-0001130384
work_keys_str_mv AT bdeng couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond
AT tsvej couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond
AT mji couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond
AT iluo couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond
AT lli couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond
AT kchzhou couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond
AT lma couplingeffectsofch4h2argasratiosandhotfilamentsubstratedistanceonthegrowthofnanocrystallinediamond
first_indexed 2025-07-17T12:09:51Z
last_indexed 2025-07-17T12:09:51Z
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