Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond
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| Date: | 2020 |
|---|---|
| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2020
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| Series: | Superhard Materials |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001130384 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859495469524189184 |
|---|---|
| author | B. Deng Ts. Vej M. Ji I. Luo L. Li K. Chzhou L. Ma |
| author_facet | B. Deng Ts. Vej M. Ji I. Luo L. Li K. Chzhou L. Ma |
| author_sort | B. Deng |
| collection | Open-Science |
| first_indexed | 2025-07-17T12:09:51Z |
| format | Article |
| id | open-sciencenbuvgovua-11476 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T12:09:51Z |
| publishDate | 2020 |
| record_format | dspace |
| series | Superhard Materials |
| spelling | open-sciencenbuvgovua-114762024-02-25T17:55:22Z Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond B. Deng Ts. Vej M. Ji I. Luo L. Li K. Chzhou L. Ma 0203-3119 2020 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001130384 Article |
| spellingShingle | Superhard Materials B. Deng Ts. Vej M. Ji I. Luo L. Li K. Chzhou L. Ma Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| title | Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| title_full | Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| title_fullStr | Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| title_full_unstemmed | Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| title_short | Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| title_sort | coupling effects of ch4/h2/ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001130384 |
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