Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review

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Бібліографічні деталі
Дата:2020
Автор: Yu. D. Filatov
Формат: Стаття
Мова:English
Опубліковано: 2020
Назва видання:Superhard Materials
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0001132111
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-115822024-02-25T17:55:37Z Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review Yu. D. Filatov 0203-3119 2020 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001132111 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Superhard Materials
spellingShingle Superhard Materials
Yu. D. Filatov
Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review
format Article
author Yu. D. Filatov
author_facet Yu. D. Filatov
author_sort Yu. D. Filatov
title Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review
title_short Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review
title_full Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review
title_fullStr Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review
title_full_unstemmed Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review
title_sort polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. review
publishDate 2020
url http://jnas.nbuv.gov.ua/article/UJRN-0001132111
work_keys_str_mv AT yudfilatov polishingofprecisionsurfacesofoptoelectronictechnologyelementsfromglasssitalsopticalandsemiconductorcrystalsreview
first_indexed 2024-03-30T07:03:54Z
last_indexed 2024-03-30T07:03:54Z
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