Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review
Збережено в:
Дата: | 2020 |
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Автор: | |
Формат: | Стаття |
Мова: | English |
Опубліковано: |
2020
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Назва видання: | Superhard Materials |
Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001132111 |
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Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-115822024-02-25T17:55:37Z Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review Yu. D. Filatov 0203-3119 2020 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001132111 Article |
institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
collection |
Open-Science |
language |
English |
series |
Superhard Materials |
spellingShingle |
Superhard Materials Yu. D. Filatov Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
format |
Article |
author |
Yu. D. Filatov |
author_facet |
Yu. D. Filatov |
author_sort |
Yu. D. Filatov |
title |
Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
title_short |
Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
title_full |
Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
title_fullStr |
Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
title_full_unstemmed |
Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
title_sort |
polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. review |
publishDate |
2020 |
url |
http://jnas.nbuv.gov.ua/article/UJRN-0001132111 |
work_keys_str_mv |
AT yudfilatov polishingofprecisionsurfacesofoptoelectronictechnologyelementsfromglasssitalsopticalandsemiconductorcrystalsreview |
first_indexed |
2024-03-30T07:03:54Z |
last_indexed |
2024-03-30T07:03:54Z |
_version_ |
1796878476293177344 |