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Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review
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| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
2020
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| Series: | Superhard Materials |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001132111 |
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open-sciencenbuvgovua-115822024-02-25T17:55:37Z Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review Yu. D. Filatov 0203-3119 2020 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001132111 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials Yu. D. Filatov Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
| format |
Article |
| author |
Yu. D. Filatov |
| author_facet |
Yu. D. Filatov |
| author_sort |
Yu. D. Filatov |
| title |
Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
| title_short |
Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
| title_full |
Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
| title_fullStr |
Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
| title_full_unstemmed |
Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
| title_sort |
polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. review |
| publishDate |
2020 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001132111 |
| work_keys_str_mv |
AT yudfilatov polishingofprecisionsurfacesofoptoelectronictechnologyelementsfromglasssitalsopticalandsemiconductorcrystalsreview |
| first_indexed |
2024-03-30T07:03:54Z |
| last_indexed |
2024-03-30T07:03:54Z |
| _version_ |
1796878476293177344 |