Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review
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| Date: | 2020 |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
2020
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| Series: | Superhard Materials |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001132111 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859495583144738816 |
|---|---|
| author | Yu. D. Filatov |
| author_facet | Yu. D. Filatov |
| author_sort | Yu. D. Filatov |
| collection | Open-Science |
| first_indexed | 2025-07-17T12:10:49Z |
| format | Article |
| id | open-sciencenbuvgovua-11582 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T12:10:49Z |
| publishDate | 2020 |
| record_format | dspace |
| series | Superhard Materials |
| spelling | open-sciencenbuvgovua-115822024-02-25T17:55:37Z Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review Yu. D. Filatov 0203-3119 2020 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001132111 Article |
| spellingShingle | Superhard Materials Yu. D. Filatov Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
| title | Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
| title_full | Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
| title_fullStr | Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
| title_full_unstemmed | Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
| title_short | Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review |
| title_sort | polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. review |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001132111 |
| work_keys_str_mv | AT yudfilatov polishingofprecisionsurfacesofoptoelectronictechnologyelementsfromglasssitalsopticalandsemiconductorcrystalsreview |