Influence of gettering on aluminum ohmic contact formation
Збережено в:
| Дата: | 2020 |
|---|---|
| Автори: | , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2020
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| Назва видання: | Technology and design in electronic equipment |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001194825 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859501716045561856 |
|---|---|
| author | V. N. Litvinenko Ye. A. Baganov I. M. Vikulin V. E. Gorbachev |
| author_facet | V. N. Litvinenko Ye. A. Baganov I. M. Vikulin V. E. Gorbachev |
| author_sort | V. N. Litvinenko |
| collection | Open-Science |
| first_indexed | 2025-07-17T12:41:48Z |
| format | Article |
| id | open-sciencenbuvgovua-14748 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T12:41:48Z |
| publishDate | 2020 |
| record_format | dspace |
| series | Technology and design in electronic equipment |
| spelling | open-sciencenbuvgovua-147482024-02-25T18:03:16Z Influence of gettering on aluminum ohmic contact formation V. N. Litvinenko Ye. A. Baganov I. M. Vikulin V. E. Gorbachev 2225-5818 2020 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0001194825 Article |
| spellingShingle | Technology and design in electronic equipment V. N. Litvinenko Ye. A. Baganov I. M. Vikulin V. E. Gorbachev Influence of gettering on aluminum ohmic contact formation |
| title | Influence of gettering on aluminum ohmic contact formation |
| title_full | Influence of gettering on aluminum ohmic contact formation |
| title_fullStr | Influence of gettering on aluminum ohmic contact formation |
| title_full_unstemmed | Influence of gettering on aluminum ohmic contact formation |
| title_short | Influence of gettering on aluminum ohmic contact formation |
| title_sort | influence of gettering on aluminum ohmic contact formation |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001194825 |
| work_keys_str_mv | AT vnlitvinenko influenceofgetteringonaluminumohmiccontactformation AT yeabaganov influenceofgetteringonaluminumohmiccontactformation AT imvikulin influenceofgetteringonaluminumohmiccontactformation AT vegorbachev influenceofgetteringonaluminumohmiccontactformation |