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Influence of gettering on aluminum ohmic contact formation

Influence of gettering on aluminum ohmic contact formation

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Bibliographic Details
Main Authors: V. N. Litvinenko, Ye. A. Baganov, I. M. Vikulin, V. E. Gorbachev
Format: Article
Language:English
Published: 2020
Series:Technology and design in electronic equipment
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001194825
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id open-sciencenbuvgovua-14748
record_format dspace
spelling open-sciencenbuvgovua-147482024-02-25T18:03:16Z Influence of gettering on aluminum ohmic contact formation V. N. Litvinenko Ye. A. Baganov I. M. Vikulin V. E. Gorbachev 2225-5818 2020 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0001194825 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Technology and design in electronic equipment
spellingShingle Technology and design in electronic equipment
V. N. Litvinenko
Ye. A. Baganov
I. M. Vikulin
V. E. Gorbachev
Influence of gettering on aluminum ohmic contact formation
format Article
author V. N. Litvinenko
Ye. A. Baganov
I. M. Vikulin
V. E. Gorbachev
author_facet V. N. Litvinenko
Ye. A. Baganov
I. M. Vikulin
V. E. Gorbachev
author_sort V. N. Litvinenko
title Influence of gettering on aluminum ohmic contact formation
title_short Influence of gettering on aluminum ohmic contact formation
title_full Influence of gettering on aluminum ohmic contact formation
title_fullStr Influence of gettering on aluminum ohmic contact formation
title_full_unstemmed Influence of gettering on aluminum ohmic contact formation
title_sort influence of gettering on aluminum ohmic contact formation
publishDate 2020
url http://jnas.nbuv.gov.ua/article/UJRN-0001194825
work_keys_str_mv AT vnlitvinenko influenceofgetteringonaluminumohmiccontactformation
AT yeabaganov influenceofgetteringonaluminumohmiccontactformation
AT imvikulin influenceofgetteringonaluminumohmiccontactformation
AT vegorbachev influenceofgetteringonaluminumohmiccontactformation
first_indexed 2024-03-30T07:18:44Z
last_indexed 2024-03-30T07:18:44Z
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