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Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering

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Bibliographic Details
Main Authors: A. O. Kozak, V. I. Ivashchenko, P. L. Skrynskyi, V. B. Muratov, V. V. Tetorkin, A. Sukach, O. K. Synelnychenko, O. I. Olifan
Format: Article
Language:English
Published: 2020
Series:Superhard Materials
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001195658
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spelling open-sciencenbuvgovua-147792024-02-25T18:03:19Z Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering A. O. Kozak V. I. Ivashchenko P. L. Skrynskyi V. B. Muratov V. V. Tetorkin A. Sukach O. K. Synelnychenko O. I. Olifan 0203-3119 2020 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001195658 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Superhard Materials
spellingShingle Superhard Materials
A. O. Kozak
V. I. Ivashchenko
P. L. Skrynskyi
V. B. Muratov
V. V. Tetorkin
A. Sukach
O. K. Synelnychenko
O. I. Olifan
Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering
format Article
author A. O. Kozak
V. I. Ivashchenko
P. L. Skrynskyi
V. B. Muratov
V. V. Tetorkin
A. Sukach
O. K. Synelnychenko
O. I. Olifan
author_facet A. O. Kozak
V. I. Ivashchenko
P. L. Skrynskyi
V. B. Muratov
V. V. Tetorkin
A. Sukach
O. K. Synelnychenko
O. I. Olifan
author_sort A. O. Kozak
title Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering
title_short Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering
title_full Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering
title_fullStr Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering
title_full_unstemmed Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering
title_sort structure and properties of the coatings of the al–b–si–c system deposited by magnetron sputtering
publishDate 2020
url http://jnas.nbuv.gov.ua/article/UJRN-0001195658
work_keys_str_mv AT aokozak structureandpropertiesofthecoatingsofthealbsicsystemdepositedbymagnetronsputtering
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AT plskrynskyi structureandpropertiesofthecoatingsofthealbsicsystemdepositedbymagnetronsputtering
AT vbmuratov structureandpropertiesofthecoatingsofthealbsicsystemdepositedbymagnetronsputtering
AT vvtetorkin structureandpropertiesofthecoatingsofthealbsicsystemdepositedbymagnetronsputtering
AT asukach structureandpropertiesofthecoatingsofthealbsicsystemdepositedbymagnetronsputtering
AT oksynelnychenko structureandpropertiesofthecoatingsofthealbsicsystemdepositedbymagnetronsputtering
AT oiolifan structureandpropertiesofthecoatingsofthealbsicsystemdepositedbymagnetronsputtering
first_indexed 2024-03-30T07:18:53Z
last_indexed 2024-03-30T07:18:53Z
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