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Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering

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Bibliographic Details
Main Authors:	A. O. Kozak, V. I. Ivashchenko, P. L. Skrynskyi, V. B. Muratov, V. V. Tetorkin, A. Sukach, O. K. Synelnychenko, O. I. Olifan
Format:	Article
Language:	English
Published:	2020
Series:	Superhard Materials
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001195658
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Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering

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