System for controlling mass balance of gases and reagents during formation of ion-plasma coatings

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Bibliographic Details
Date:2020
Main Author: K. V. Diadiun
Format: Article
Language:English
Published: 2020
Series:Scientific Notes of Junior Academy of Sciences of Ukraine
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001223708
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
_version_ 1859502665725116416
author K. V. Diadiun
author_facet K. V. Diadiun
author_sort K. V. Diadiun
collection Open-Science
first_indexed 2025-07-17T12:52:20Z
format Article
id open-sciencenbuvgovua-15798
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
language English
last_indexed 2025-07-17T12:52:20Z
publishDate 2020
record_format dspace
series Scientific Notes of Junior Academy of Sciences of Ukraine
spelling open-sciencenbuvgovua-157982024-02-25T18:05:51Z System for controlling mass balance of gases and reagents during formation of ion-plasma coatings K. V. Diadiun 2618-0529 2020 en Scientific Notes of Junior Academy of Sciences of Ukraine http://jnas.nbuv.gov.ua/article/UJRN-0001223708 Article
spellingShingle Scientific Notes of Junior Academy of Sciences of Ukraine
K. V. Diadiun
System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
title System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
title_full System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
title_fullStr System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
title_full_unstemmed System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
title_short System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
title_sort system for controlling mass balance of gases and reagents during formation of ion-plasma coatings
url http://jnas.nbuv.gov.ua/article/UJRN-0001223708
work_keys_str_mv AT kvdiadiun systemforcontrollingmassbalanceofgasesandreagentsduringformationofionplasmacoatings