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System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
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| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
2020
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| Series: | Scientific Notes of Junior Academy of Sciences of Ukraine |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001223708 |
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open-sciencenbuvgovua-157982024-02-25T18:05:51Z System for controlling mass balance of gases and reagents during formation of ion-plasma coatings K. V. Diadiun 2618-0529 2020 en Scientific Notes of Junior Academy of Sciences of Ukraine http://jnas.nbuv.gov.ua/article/UJRN-0001223708 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Scientific Notes of Junior Academy of Sciences of Ukraine |
| spellingShingle |
Scientific Notes of Junior Academy of Sciences of Ukraine K. V. Diadiun System for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| format |
Article |
| author |
K. V. Diadiun |
| author_facet |
K. V. Diadiun |
| author_sort |
K. V. Diadiun |
| title |
System for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| title_short |
System for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| title_full |
System for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| title_fullStr |
System for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| title_full_unstemmed |
System for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| title_sort |
system for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| publishDate |
2020 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001223708 |
| work_keys_str_mv |
AT kvdiadiun systemforcontrollingmassbalanceofgasesandreagentsduringformationofionplasmacoatings |
| first_indexed |
2024-03-30T07:23:32Z |
| last_indexed |
2024-03-30T07:23:32Z |
| _version_ |
1796878916647911424 |