System for controlling mass balance of gases and reagents during formation of ion-plasma coatings

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Datum:2020
1. Verfasser: K. V. Diadiun
Format: Artikel
Sprache:Englisch
Veröffentlicht: 2020
Schriftenreihe:Scientific Notes of Junior Academy of Sciences of Ukraine
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0001223708
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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author K. V. Diadiun
author_facet K. V. Diadiun
author_sort K. V. Diadiun
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institution Library portal of National Academy of Sciences of Ukraine | LibNAS
language English
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publishDate 2020
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series Scientific Notes of Junior Academy of Sciences of Ukraine
spelling open-sciencenbuvgovua-157982024-02-25T18:05:51Z System for controlling mass balance of gases and reagents during formation of ion-plasma coatings K. V. Diadiun 2618-0529 2020 en Scientific Notes of Junior Academy of Sciences of Ukraine http://jnas.nbuv.gov.ua/article/UJRN-0001223708 Article
spellingShingle Scientific Notes of Junior Academy of Sciences of Ukraine
K. V. Diadiun
System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
title System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
title_full System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
title_fullStr System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
title_full_unstemmed System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
title_short System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
title_sort system for controlling mass balance of gases and reagents during formation of ion-plasma coatings
url http://jnas.nbuv.gov.ua/article/UJRN-0001223708
work_keys_str_mv AT kvdiadiun systemforcontrollingmassbalanceofgasesandreagentsduringformationofionplasmacoatings