System for controlling mass balance of gases and reagents during formation of ion-plasma coatings
Збережено в:
| Дата: | 2020 |
|---|---|
| Автор: | |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2020
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| Назва видання: | Scientific Notes of Junior Academy of Sciences of Ukraine |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001223708 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859502665725116416 |
|---|---|
| author | K. V. Diadiun |
| author_facet | K. V. Diadiun |
| author_sort | K. V. Diadiun |
| collection | Open-Science |
| first_indexed | 2025-07-17T12:52:20Z |
| format | Article |
| id | open-sciencenbuvgovua-15798 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T12:52:20Z |
| publishDate | 2020 |
| record_format | dspace |
| series | Scientific Notes of Junior Academy of Sciences of Ukraine |
| spelling | open-sciencenbuvgovua-157982024-02-25T18:05:51Z System for controlling mass balance of gases and reagents during formation of ion-plasma coatings K. V. Diadiun 2618-0529 2020 en Scientific Notes of Junior Academy of Sciences of Ukraine http://jnas.nbuv.gov.ua/article/UJRN-0001223708 Article |
| spellingShingle | Scientific Notes of Junior Academy of Sciences of Ukraine K. V. Diadiun System for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| title | System for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| title_full | System for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| title_fullStr | System for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| title_full_unstemmed | System for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| title_short | System for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| title_sort | system for controlling mass balance of gases and reagents during formation of ion-plasma coatings |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001223708 |
| work_keys_str_mv | AT kvdiadiun systemforcontrollingmassbalanceofgasesandreagentsduringformationofionplasmacoatings |