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System for controlling mass balance of gases and reagents during formation of ion-plasma coatings

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Bibliographic Details
Date:	2020
Main Author:	K. V. Diadiun
Format:	Article
Language:	English
Published:	2020
Series:	Scientific Notes of Junior Academy of Sciences of Ukraine
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001223708
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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