The effect of ion implantation on structural damage in compositionally graded AlGaN layers
Збережено в:
| Дата: | 2019 |
|---|---|
| Автори: | , , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2019
|
| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001000445 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859504915655688192 |
|---|---|
| author | O. I. Liubchenko V. P. Kladko H. V. Stanchu T. M. Sabov V. P. Melnik S. B. Kryvyi A. E. Belyaev |
| author_facet | O. I. Liubchenko V. P. Kladko H. V. Stanchu T. M. Sabov V. P. Melnik S. B. Kryvyi A. E. Belyaev |
| author_sort | O. I. Liubchenko |
| collection | Open-Science |
| first_indexed | 2025-07-17T13:20:46Z |
| format | Article |
| id | open-sciencenbuvgovua-18336 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T13:20:46Z |
| publishDate | 2019 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-183362024-02-26T22:00:16Z The effect of ion implantation on structural damage in compositionally graded AlGaN layers O. I. Liubchenko V. P. Kladko H. V. Stanchu T. M. Sabov V. P. Melnik S. B. Kryvyi A. E. Belyaev 1560-8034 2019 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0001000445 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics O. I. Liubchenko V. P. Kladko H. V. Stanchu T. M. Sabov V. P. Melnik S. B. Kryvyi A. E. Belyaev The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title | The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_full | The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_fullStr | The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_full_unstemmed | The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_short | The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_sort | effect of ion implantation on structural damage in compositionally graded algan layers |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001000445 |
| work_keys_str_mv | AT oiliubchenko theeffectofionimplantationonstructuraldamageincompositionallygradedalganlayers AT vpkladko theeffectofionimplantationonstructuraldamageincompositionallygradedalganlayers AT hvstanchu theeffectofionimplantationonstructuraldamageincompositionallygradedalganlayers AT tmsabov theeffectofionimplantationonstructuraldamageincompositionallygradedalganlayers AT vpmelnik theeffectofionimplantationonstructuraldamageincompositionallygradedalganlayers AT sbkryvyi theeffectofionimplantationonstructuraldamageincompositionallygradedalganlayers AT aebelyaev theeffectofionimplantationonstructuraldamageincompositionallygradedalganlayers AT oiliubchenko effectofionimplantationonstructuraldamageincompositionallygradedalganlayers AT vpkladko effectofionimplantationonstructuraldamageincompositionallygradedalganlayers AT hvstanchu effectofionimplantationonstructuraldamageincompositionallygradedalganlayers AT tmsabov effectofionimplantationonstructuraldamageincompositionallygradedalganlayers AT vpmelnik effectofionimplantationonstructuraldamageincompositionallygradedalganlayers AT sbkryvyi effectofionimplantationonstructuraldamageincompositionallygradedalganlayers AT aebelyaev effectofionimplantationonstructuraldamageincompositionallygradedalganlayers |