The effect of ion implantation on structural damage in compositionally graded AlGaN layers
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| Date: | 2019 |
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| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2019
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| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001000445 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-183362024-02-26T22:00:16Z The effect of ion implantation on structural damage in compositionally graded AlGaN layers O. I. Liubchenko V. P. Kladko H. V. Stanchu T. M. Sabov V. P. Melnik S. B. Kryvyi A. E. Belyaev 1560-8034 2019 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0001000445 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics O. I. Liubchenko V. P. Kladko H. V. Stanchu T. M. Sabov V. P. Melnik S. B. Kryvyi A. E. Belyaev The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| format |
Article |
| author |
O. I. Liubchenko V. P. Kladko H. V. Stanchu T. M. Sabov V. P. Melnik S. B. Kryvyi A. E. Belyaev |
| author_facet |
O. I. Liubchenko V. P. Kladko H. V. Stanchu T. M. Sabov V. P. Melnik S. B. Kryvyi A. E. Belyaev |
| author_sort |
O. I. Liubchenko |
| title |
The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_short |
The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_full |
The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_fullStr |
The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_full_unstemmed |
The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_sort |
effect of ion implantation on structural damage in compositionally graded algan layers |
| publishDate |
2019 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001000445 |
| work_keys_str_mv |
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| first_indexed |
2025-07-17T13:20:46Z |
| last_indexed |
2025-07-17T13:20:46Z |
| _version_ |
1850412932685365248 |