The effect of ion implantation on structural damage in compositionally graded AlGaN layers
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| Datum: | 2019 |
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| Hauptverfasser: | , , , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2019
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0001000445 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859504915655688192 |
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| author | O. I. Liubchenko V. P. Kladko H. V. Stanchu T. M. Sabov V. P. Melnik S. B. Kryvyi A. E. Belyaev |
| author_facet | O. I. Liubchenko V. P. Kladko H. V. Stanchu T. M. Sabov V. P. Melnik S. B. Kryvyi A. E. Belyaev |
| author_sort | O. I. Liubchenko |
| collection | Open-Science |
| first_indexed | 2025-07-17T13:20:46Z |
| format | Article |
| id | open-sciencenbuvgovua-18336 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T13:20:46Z |
| publishDate | 2019 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-183362024-02-26T22:00:16Z The effect of ion implantation on structural damage in compositionally graded AlGaN layers O. I. Liubchenko V. P. Kladko H. V. Stanchu T. M. Sabov V. P. Melnik S. B. Kryvyi A. E. Belyaev 1560-8034 2019 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0001000445 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics O. I. Liubchenko V. P. Kladko H. V. Stanchu T. M. Sabov V. P. Melnik S. B. Kryvyi A. E. Belyaev The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title | The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_full | The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_fullStr | The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_full_unstemmed | The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_short | The effect of ion implantation on structural damage in compositionally graded AlGaN layers |
| title_sort | effect of ion implantation on structural damage in compositionally graded algan layers |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001000445 |
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