The effect of ion implantation on structural damage in compositionally graded AlGaN layers

The effect of ion implantation on structural damage in compositionally graded AlGaN layers

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Datum:2019
Hauptverfasser: O. I. Liubchenko, V. P. Kladko, H. V. Stanchu, T. M. Sabov, V. P. Melnik, S. B. Kryvyi, A. E. Belyaev
Format: Artikel
Sprache:English
Veröffentlicht: 2019
Schriftenreihe:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0001000445
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-18336
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spelling open-sciencenbuvgovua-183362024-02-26T22:00:16Z The effect of ion implantation on structural damage in compositionally graded AlGaN layers O. I. Liubchenko V. P. Kladko H. V. Stanchu T. M. Sabov V. P. Melnik S. B. Kryvyi A. E. Belyaev 1560-8034 2019 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0001000445 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
O. I. Liubchenko
V. P. Kladko
H. V. Stanchu
T. M. Sabov
V. P. Melnik
S. B. Kryvyi
A. E. Belyaev
The effect of ion implantation on structural damage in compositionally graded AlGaN layers
format Article
author O. I. Liubchenko
V. P. Kladko
H. V. Stanchu
T. M. Sabov
V. P. Melnik
S. B. Kryvyi
A. E. Belyaev
author_facet O. I. Liubchenko
V. P. Kladko
H. V. Stanchu
T. M. Sabov
V. P. Melnik
S. B. Kryvyi
A. E. Belyaev
author_sort O. I. Liubchenko
title The effect of ion implantation on structural damage in compositionally graded AlGaN layers
title_short The effect of ion implantation on structural damage in compositionally graded AlGaN layers
title_full The effect of ion implantation on structural damage in compositionally graded AlGaN layers
title_fullStr The effect of ion implantation on structural damage in compositionally graded AlGaN layers
title_full_unstemmed The effect of ion implantation on structural damage in compositionally graded AlGaN layers
title_sort effect of ion implantation on structural damage in compositionally graded algan layers
publishDate 2019
url http://jnas.nbuv.gov.ua/article/UJRN-0001000445
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first_indexed 2025-07-17T13:20:46Z
last_indexed 2025-07-17T13:20:46Z
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