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The influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating TiSiN/NbN

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Bibliographic Details
Date:	2022
Main Authors:	D. V. Horokh, O. V. Maksakova, C. A. Klymenko, S. V. Lytovchenko, V. M. Beresniev, O. V. Hlukhov
Format:	Article
Language:	English
Published:	2022
Series:	Superhard Materials
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001367365
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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