Borysov, Y. S., Volos, O. V., Vihilianska, N. V., Zadoia, V. H., & Strelchuk, V. V. (2022). Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings.
Chicago-Zitierstil (17. Ausg.)Borysov, Yu. S., O. V. Volos, N. V. Vihilianska, V. H. Zadoia, und V. V. Strelchuk. Influence of Parameters of Magnetron Sputtering Process on Phase Composition and Structure of Carbon Nitride Coatings. 2022.
MLA-Zitierstil (8. Ausg.)Borysov, Yu. S., et al. Influence of Parameters of Magnetron Sputtering Process on Phase Composition and Structure of Carbon Nitride Coatings. 2022.
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