Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings
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| Datum: | 2022 |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2022
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| Schriftenreihe: | Automatic Welding |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0001369183 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859480022824255488 |
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| author | Yu. S. Borysov O. V. Volos N. V. Vihilianska V. H. Zadoia V. V. Strelchuk |
| author_facet | Yu. S. Borysov O. V. Volos N. V. Vihilianska V. H. Zadoia V. V. Strelchuk |
| author_sort | Yu. S. Borysov |
| collection | Open-Science |
| first_indexed | 2025-07-17T10:36:41Z |
| format | Article |
| id | open-sciencenbuvgovua-1942 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T10:36:41Z |
| publishDate | 2022 |
| record_format | dspace |
| series | Automatic Welding |
| spelling | open-sciencenbuvgovua-19422023-09-12T18:00:41Z Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings Yu. S. Borysov O. V. Volos N. V. Vihilianska V. H. Zadoia V. V. Strelchuk 0005-111X 2022 en Automatic Welding http://jnas.nbuv.gov.ua/article/UJRN-0001369183 Article |
| spellingShingle | Automatic Welding Yu. S. Borysov O. V. Volos N. V. Vihilianska V. H. Zadoia V. V. Strelchuk Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings |
| title | Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings |
| title_full | Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings |
| title_fullStr | Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings |
| title_full_unstemmed | Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings |
| title_short | Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings |
| title_sort | influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001369183 |
| work_keys_str_mv | AT yusborysov influenceofparametersofmagnetronsputteringprocessonphasecompositionandstructureofcarbonnitridecoatings AT ovvolos influenceofparametersofmagnetronsputteringprocessonphasecompositionandstructureofcarbonnitridecoatings AT nvvihilianska influenceofparametersofmagnetronsputteringprocessonphasecompositionandstructureofcarbonnitridecoatings AT vhzadoia influenceofparametersofmagnetronsputteringprocessonphasecompositionandstructureofcarbonnitridecoatings AT vvstrelchuk influenceofparametersofmagnetronsputteringprocessonphasecompositionandstructureofcarbonnitridecoatings |