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Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings

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Bibliographic Details
Date:	2022
Main Authors:	Yu. S. Borysov, O. V. Volos, N. V. Vihilianska, V. H. Zadoia, V. V. Strelchuk
Format:	Article
Language:	English
Published:	2022
Series:	Automatic Welding
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001369183
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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