Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication
Збережено в:
| Дата: | 2019 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2019
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| Назва видання: | Science and innovation |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001021001 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859506082992357376 |
|---|---|
| author | A. G. Ponomarev V. A. Rebrov S. V. Kolinko |
| author_facet | A. G. Ponomarev V. A. Rebrov S. V. Kolinko |
| author_sort | A. G. Ponomarev |
| collection | Open-Science |
| first_indexed | 2025-07-17T13:32:14Z |
| format | Article |
| id | open-sciencenbuvgovua-19597 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T13:32:14Z |
| publishDate | 2019 |
| record_format | dspace |
| series | Science and innovation |
| spelling | open-sciencenbuvgovua-195972024-02-26T22:04:43Z Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication A. G. Ponomarev V. A. Rebrov S. V. Kolinko 1815-2066 2019 en Science and innovation http://jnas.nbuv.gov.ua/article/UJRN-0001021001 Article |
| spellingShingle | Science and innovation A. G. Ponomarev V. A. Rebrov S. V. Kolinko Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication |
| title | Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication |
| title_full | Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication |
| title_fullStr | Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication |
| title_full_unstemmed | Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication |
| title_short | Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication |
| title_sort | proton beam writing device based on electrostatic accelerator for 3d micro- and nano-structure fabrication |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001021001 |
| work_keys_str_mv | AT agponomarev protonbeamwritingdevicebasedonelectrostaticacceleratorfor3dmicroandnanostructurefabrication AT varebrov protonbeamwritingdevicebasedonelectrostaticacceleratorfor3dmicroandnanostructurefabrication AT svkolinko protonbeamwritingdevicebasedonelectrostaticacceleratorfor3dmicroandnanostructurefabrication |