Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication
Збережено в:
| Дата: | 2019 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2019
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| Назва видання: | Science and innovation |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001021001 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-19597 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-195972024-02-26T22:04:43Z Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication A. G. Ponomarev V. A. Rebrov S. V. Kolinko 1815-2066 2019 en Science and innovation http://jnas.nbuv.gov.ua/article/UJRN-0001021001 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Science and innovation |
| spellingShingle |
Science and innovation A. G. Ponomarev V. A. Rebrov S. V. Kolinko Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication |
| format |
Article |
| author |
A. G. Ponomarev V. A. Rebrov S. V. Kolinko |
| author_facet |
A. G. Ponomarev V. A. Rebrov S. V. Kolinko |
| author_sort |
A. G. Ponomarev |
| title |
Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication |
| title_short |
Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication |
| title_full |
Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication |
| title_fullStr |
Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication |
| title_full_unstemmed |
Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication |
| title_sort |
proton beam writing device based on electrostatic accelerator for 3d micro- and nano-structure fabrication |
| publishDate |
2019 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001021001 |
| work_keys_str_mv |
AT agponomarev protonbeamwritingdevicebasedonelectrostaticacceleratorfor3dmicroandnanostructurefabrication AT varebrov protonbeamwritingdevicebasedonelectrostaticacceleratorfor3dmicroandnanostructurefabrication AT svkolinko protonbeamwritingdevicebasedonelectrostaticacceleratorfor3dmicroandnanostructurefabrication |
| first_indexed |
2024-03-30T07:40:57Z |
| last_indexed |
2024-03-30T07:40:57Z |
| _version_ |
1796879313744691200 |