Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication

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Datum:2019
Hauptverfasser: A. G. Ponomarev, V. A. Rebrov, S. V. Kolinko
Format: Artikel
Sprache:English
Veröffentlicht: 2019
Schriftenreihe:Science and innovation
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0001021001
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-19597
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spelling open-sciencenbuvgovua-195972024-02-26T22:04:43Z Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication A. G. Ponomarev V. A. Rebrov S. V. Kolinko 1815-2066 2019 en Science and innovation http://jnas.nbuv.gov.ua/article/UJRN-0001021001 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Science and innovation
spellingShingle Science and innovation
A. G. Ponomarev
V. A. Rebrov
S. V. Kolinko
Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication
format Article
author A. G. Ponomarev
V. A. Rebrov
S. V. Kolinko
author_facet A. G. Ponomarev
V. A. Rebrov
S. V. Kolinko
author_sort A. G. Ponomarev
title Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication
title_short Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication
title_full Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication
title_fullStr Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication
title_full_unstemmed Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication
title_sort proton beam writing device based on electrostatic accelerator for 3d micro- and nano-structure fabrication
publishDate 2019
url http://jnas.nbuv.gov.ua/article/UJRN-0001021001
work_keys_str_mv AT agponomarev protonbeamwritingdevicebasedonelectrostaticacceleratorfor3dmicroandnanostructurefabrication
AT varebrov protonbeamwritingdevicebasedonelectrostaticacceleratorfor3dmicroandnanostructurefabrication
AT svkolinko protonbeamwritingdevicebasedonelectrostaticacceleratorfor3dmicroandnanostructurefabrication
first_indexed 2025-07-17T13:32:14Z
last_indexed 2025-07-17T13:32:14Z
_version_ 1850413087332499456