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Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication

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Bibliographic Details
Date:	2019
Main Authors:	A. G. Ponomarev, V. A. Rebrov, S. V. Kolinko
Format:	Article
Language:	English
Published:	2019
Series:	Science and innovation
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001021001
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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