Kuzmichev, A. I., Ustinov, A. I., Rudenko, A. E., & Drozd, I. M. (2019). Hybrid systems for electron beam evaporation and ion sputtering.
Chicago Style (17th ed.) CitationKuzmichev, A. I., A. I. Ustinov, A. E. Rudenko, and I. M. Drozd. Hybrid Systems for Electron Beam Evaporation and Ion Sputtering. 2019.
MLA (8th ed.) CitationKuzmichev, A. I., et al. Hybrid Systems for Electron Beam Evaporation and Ion Sputtering. 2019.
Warning: These citations may not always be 100% accurate.