Hybrid systems for electron beam evaporation and ion sputtering
Gespeichert in:
| Datum: | 2019 |
|---|---|
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2019
|
| Schriftenreihe: | Electrometallurgy Today |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0001079866 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-23074 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-230742024-02-26T22:25:37Z Hybrid systems for electron beam evaporation and ion sputtering A. I. Kuzmichev A. I. Ustinov A. E. Rudenko I. M. Drozd 2415-8445 2019 en Electrometallurgy Today http://jnas.nbuv.gov.ua/article/UJRN-0001079866 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Electrometallurgy Today |
| spellingShingle |
Electrometallurgy Today A. I. Kuzmichev A. I. Ustinov A. E. Rudenko I. M. Drozd Hybrid systems for electron beam evaporation and ion sputtering |
| format |
Article |
| author |
A. I. Kuzmichev A. I. Ustinov A. E. Rudenko I. M. Drozd |
| author_facet |
A. I. Kuzmichev A. I. Ustinov A. E. Rudenko I. M. Drozd |
| author_sort |
A. I. Kuzmichev |
| title |
Hybrid systems for electron beam evaporation and ion sputtering |
| title_short |
Hybrid systems for electron beam evaporation and ion sputtering |
| title_full |
Hybrid systems for electron beam evaporation and ion sputtering |
| title_fullStr |
Hybrid systems for electron beam evaporation and ion sputtering |
| title_full_unstemmed |
Hybrid systems for electron beam evaporation and ion sputtering |
| title_sort |
hybrid systems for electron beam evaporation and ion sputtering |
| publishDate |
2019 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001079866 |
| work_keys_str_mv |
AT aikuzmichev hybridsystemsforelectronbeamevaporationandionsputtering AT aiustinov hybridsystemsforelectronbeamevaporationandionsputtering AT aerudenko hybridsystemsforelectronbeamevaporationandionsputtering AT imdrozd hybridsystemsforelectronbeamevaporationandionsputtering |
| first_indexed |
2025-07-17T14:03:28Z |
| last_indexed |
2025-07-17T14:03:28Z |
| _version_ |
1850413487257288704 |