Hybrid systems for electron beam evaporation and ion sputtering
Збережено в:
| Дата: | 2019 |
|---|---|
| Автори: | , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2019
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| Назва видання: | Electrometallurgy Today |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001079866 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859507644048343040 |
|---|---|
| author | A. I. Kuzmichev A. I. Ustinov A. E. Rudenko I. M. Drozd |
| author_facet | A. I. Kuzmichev A. I. Ustinov A. E. Rudenko I. M. Drozd |
| author_sort | A. I. Kuzmichev |
| collection | Open-Science |
| first_indexed | 2025-07-17T14:03:28Z |
| format | Article |
| id | open-sciencenbuvgovua-23074 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T14:03:28Z |
| publishDate | 2019 |
| record_format | dspace |
| series | Electrometallurgy Today |
| spelling | open-sciencenbuvgovua-230742024-02-26T22:25:37Z Hybrid systems for electron beam evaporation and ion sputtering A. I. Kuzmichev A. I. Ustinov A. E. Rudenko I. M. Drozd 2415-8445 2019 en Electrometallurgy Today http://jnas.nbuv.gov.ua/article/UJRN-0001079866 Article |
| spellingShingle | Electrometallurgy Today A. I. Kuzmichev A. I. Ustinov A. E. Rudenko I. M. Drozd Hybrid systems for electron beam evaporation and ion sputtering |
| title | Hybrid systems for electron beam evaporation and ion sputtering |
| title_full | Hybrid systems for electron beam evaporation and ion sputtering |
| title_fullStr | Hybrid systems for electron beam evaporation and ion sputtering |
| title_full_unstemmed | Hybrid systems for electron beam evaporation and ion sputtering |
| title_short | Hybrid systems for electron beam evaporation and ion sputtering |
| title_sort | hybrid systems for electron beam evaporation and ion sputtering |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001079866 |
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