Hybrid systems for electron beam evaporation and ion sputtering

Hybrid systems for electron beam evaporation and ion sputtering

Saved in:
Bibliographic Details
Date:2019
Main Authors: A. I. Kuzmichev, A. I. Ustinov, A. E. Rudenko, I. M. Drozd
Format: Article
Language:English
Published: 2019
Series:Electrometallurgy Today
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001079866
Tags: Add Tag
No Tags, Be the first to tag this record!
Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

Institution

Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-23074
record_format dspace
spelling open-sciencenbuvgovua-230742024-02-26T22:25:37Z Hybrid systems for electron beam evaporation and ion sputtering A. I. Kuzmichev A. I. Ustinov A. E. Rudenko I. M. Drozd 2415-8445 2019 en Electrometallurgy Today http://jnas.nbuv.gov.ua/article/UJRN-0001079866 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Electrometallurgy Today
spellingShingle Electrometallurgy Today
A. I. Kuzmichev
A. I. Ustinov
A. E. Rudenko
I. M. Drozd
Hybrid systems for electron beam evaporation and ion sputtering
format Article
author A. I. Kuzmichev
A. I. Ustinov
A. E. Rudenko
I. M. Drozd
author_facet A. I. Kuzmichev
A. I. Ustinov
A. E. Rudenko
I. M. Drozd
author_sort A. I. Kuzmichev
title Hybrid systems for electron beam evaporation and ion sputtering
title_short Hybrid systems for electron beam evaporation and ion sputtering
title_full Hybrid systems for electron beam evaporation and ion sputtering
title_fullStr Hybrid systems for electron beam evaporation and ion sputtering
title_full_unstemmed Hybrid systems for electron beam evaporation and ion sputtering
title_sort hybrid systems for electron beam evaporation and ion sputtering
publishDate 2019
url http://jnas.nbuv.gov.ua/article/UJRN-0001079866
work_keys_str_mv AT aikuzmichev hybridsystemsforelectronbeamevaporationandionsputtering
AT aiustinov hybridsystemsforelectronbeamevaporationandionsputtering
AT aerudenko hybridsystemsforelectronbeamevaporationandionsputtering
AT imdrozd hybridsystemsforelectronbeamevaporationandionsputtering
first_indexed 2025-07-17T14:03:28Z
last_indexed 2025-07-17T14:03:28Z
_version_ 1850413487257288704

Similar Items