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Hybrid systems for electron beam evaporation and ion sputtering

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Bibliographic Details
Date:	2019
Main Authors:	A. I. Kuzmichev, A. I. Ustinov, A. E. Rudenko, I. M. Drozd
Format:	Article
Language:	English
Published:	2019
Series:	Electrometallurgy Today
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001079866
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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