Onoprienko, A. A., Ivashchenko, V. I., Kozak, A. O., Sinelnichenko, A. K., & Tomila, T. V. (2019). Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target.
Chicago Style (17th ed.) CitationOnoprienko, A. A., V. I. Ivashchenko, A. O. Kozak, A. K. Sinelnichenko, and T. V. Tomila. Deposition and Characterization of Thin Si–B–C–N Films by Dc Reactive Magnetron Sputtering of Composed Si/B4C Target. 2019.
MLA (8th ed.) CitationOnoprienko, A. A., et al. Deposition and Characterization of Thin Si–B–C–N Films by Dc Reactive Magnetron Sputtering of Composed Si/B4C Target. 2019.
Warning: These citations may not always be 100% accurate.