Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target
Gespeichert in:
| Datum: | 2019 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2019
|
| Schriftenreihe: | Superhard Materials |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0001294418 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-25494 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-254942024-02-26T22:33:24Z Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target A. A. Onoprienko V. I. Ivashchenko A. O. Kozak A. K. Sinelnichenko T. V. Tomila 0203-3119 2019 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001294418 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials A. A. Onoprienko V. I. Ivashchenko A. O. Kozak A. K. Sinelnichenko T. V. Tomila Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target |
| format |
Article |
| author |
A. A. Onoprienko V. I. Ivashchenko A. O. Kozak A. K. Sinelnichenko T. V. Tomila |
| author_facet |
A. A. Onoprienko V. I. Ivashchenko A. O. Kozak A. K. Sinelnichenko T. V. Tomila |
| author_sort |
A. A. Onoprienko |
| title |
Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target |
| title_short |
Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target |
| title_full |
Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target |
| title_fullStr |
Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target |
| title_full_unstemmed |
Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target |
| title_sort |
deposition and characterization of thin si–b–c–n films by dc reactive magnetron sputtering of composed si/b4c target |
| publishDate |
2019 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001294418 |
| work_keys_str_mv |
AT aaonoprienko depositionandcharacterizationofthinsibcnfilmsbydcreactivemagnetronsputteringofcomposedsib4ctarget AT viivashchenko depositionandcharacterizationofthinsibcnfilmsbydcreactivemagnetronsputteringofcomposedsib4ctarget AT aokozak depositionandcharacterizationofthinsibcnfilmsbydcreactivemagnetronsputteringofcomposedsib4ctarget AT aksinelnichenko depositionandcharacterizationofthinsibcnfilmsbydcreactivemagnetronsputteringofcomposedsib4ctarget AT tvtomila depositionandcharacterizationofthinsibcnfilmsbydcreactivemagnetronsputteringofcomposedsib4ctarget |
| first_indexed |
2025-07-17T14:32:58Z |
| last_indexed |
2025-07-17T14:32:58Z |
| _version_ |
1850413762877587456 |